Specifications are offered as an assistance to Engineers and Purchasing professionals in the design and procurement of thin-film circuit substrates. Download Material Specifications in PDF format (requires Adobe Reader).
| Properties |
Units |
Polished High Density 996 Aluminum Oxide |
Asfired Superstrate 996 Aluminum Oxide |
Beryllium Oxide |
Aluminum Nitride |
Fused Silica Quartz |
Sapphire (Crystalline) |
Polished Titanates |
Ferrites & Garnets |
| Chemical Composition |
|
Al2O3 |
Al2O3 |
BeO |
AlN |
SiO2 |
A/C plane—Al2O3 |
|
|
| Purity |
% |
99.6 |
99.6 |
99.5 |
98 |
100 |
100 |
|
|
| Color |
|
White |
White |
White |
Tan |
Transparent |
Transparent |
Cream |
Gray |
| Nominal Density |
g/cm3 |
3.87 |
3.87 |
2.85 |
3.28 |
2.2 |
3.97 |
|
|
| Surface Finish (Polished) CLA |
µ-inches (nm) |
< 1.0 (25nm) |
n/a |
2.0–4.0 (50–100nm) |
< 2.0 (50nm) |
60/40 Optical |
< 1.0µ-inch (25nm) CLA |
< 3.0 (76nm) |
< 16.0 (400nm) |
| Surface Finish (Asfired) CLA |
µ-inches (nm) |
n/a |
3–4 (76–101 nm) |
n/a |
n/a |
n/a |
n/a |
n/a |
n/a |
| Camber |
inch / inch |
0.0003"–0.0005" |
0.002" |
0.0003"–0.0005" |
.0.0003"–0.0005" |
0.0003"–0.0005" |
0.0003"–0.0005" |
0.002" |
0.002" |
| Camber |
nm / nm |
76nm / 152nm |
0.0508mm |
76nm / 152nm |
76nm / 152nm |
76nm / 152nm |
76nm / 152nm |
0.0508mm |
0.0508mm |
| Thickness |
inches (mm) |
0.004"–0.080" (.100–2.0mm) |
0.005"–0.025"* (0.127–0.635mm) |
0.005"–0.025"* (0.127–0.635mm) |
0.004"–0.080" (0.100–2.0mm) |
0.004"–0.025"* (0.100–0.635mm) |
0.004"–0.025"* (0.100–0.635mm) |
0.005"–0.025"* (0.127–0.635mm) |
0.010"–0.025" (0.254–0.635mm) |
| Thickness Tolerance (±) |
inches (nm) |
0.0005 (0.0127mm) |
0.001 (0.0254mm) |
0.0005 (0.0127mm) |
0.0005 (0.0127mm) |
0.0005 (0.0127mm) |
0.0005 (0.0127mm) |
0.0005 (0.0127mm) |
0.0005 (0.0127mm) |
| Process Sizes (L&W) |
inches (mm) |
1.0"–4.0" (25.4–101.6mm) |
1.0"–6.0" (25.4–152.4mm) |
1.0"–4.00" (25.4–101.6mm) |
1.0"–4.00" (25.4–101.6mm) |
1.0"–3.00" (25.4–76.2mm) |
1.0"–2.25" (25.4–57.15mm) |
1.0"–2.25" (25.4–57.15mm) |
1.0"–2.25" (25.4–57.15mm) |
| Coefficient of Thermal Expansion (CTE) |
10–6 |
7.0–8.3 (25–1000°C) |
7.0–8.3 (25–1000°C) |
9.0 (25–1000°C) |
4.6 (25–300°C) |
0.55 (20–320°C) |
A plane @ 25°C—5.3 |
|
|
| Thermal Conductivity |
Watts/m°K |
26.9 |
26.9 |
270 |
170 |
n/a |
n/a |
|
|
| Dielectric Constant (k) |
@ 1 MHz |
9.9 ± 0.1 |
9.9 ± 0.1 |
6.5 |
8.6 |
3.826 |
11.5/9.3† |
36–180 |
14.5–17.6 |
| Dielectric Constant (k) |
@ 4 GHz |
9.9 |
9.9 |
|
|
|
|
|
|
| Dielectric Constant (k) |
@ 10 GHz |
9.7 |
9.7 |
|
|
|
|
|
|
| Dissipation Factor (Loss Tangent) |
@ 1 MHz |
0.0001 |
0.0001 |
0.0004 |
0.001 |
0.000015 |
0.00086/0.0003† |
|
|
| Dissipation Factor (Loss Tangent) |
@ 10 GHz |
0.0002 |
0.0002 |
|
|
|
|
|
|
| Q |
@ 1 GHz |
5000 |
5000 |
|
5000 |
|
|
|
|
| Hardness |
Rockwell |
87 |
87 |
45 |
n/a |
7 Mohs |
1800/2200A Knoop |
|
|
| Flexural Strength |
K(10-3) lbs/in2 |
90 |
90 |
35 (3 pt. bend) |
59 (4 pt. bend) |
25 |
60 |
|
|
| Compressive Strength |
M(10-3) lbs/in2 |
54 |
54 |
n/a |
n/a |
161 |
350 |
|
|
| Grain Size |
µm (microns) |
< 1.0 |
< 1.0 |
9–16 |
5–7 |
Amorphous |
single crystal |
|
|
* Additional thicknesses and tolerances available upon request.